New Skill Unlocked - Angle of Incidence Studies

by Patrick Morse about 2 days ago

Jan04

New Skill Unlocked - Angle of Incidence Studies

The Angle of Incidence for arriving species in a thin film deposition process can now be visualized in COMSOL. Thiss will enable more accurate denstiy, thickness, and etch estimates of growing films as a fucntion of the geometry, source configuration, and process settings.

Optimization Though Simulation

Simulation of plasma based processes builds a deeper understanding of the fundamental influences of magnetic fields, electric fields, molecular density, partial pressure, sputter yields, and secondalry electron yields in a sputteirng process. Validation for such simulations comes from characterizing the deposited fims and the target utilization.